High purity chemical delivery system solutions
Tank truck + CCB + storage tank / daily use tank + CDM supply system
The original liquid is stored in the tank truck and transported to the storage tank through the tank truck filling cabinet (CCB). The high-purity chemicals are transported to the daily-use tank by the liquid supply equipment. During operation, the liquid supply cabinet distributes the chemicals in the daily-use tank to each point of use via VMB.
All components are installed inside the device.
Flow, dosage, pressure, liquid level and other all-round automatic monitoring chain. Ensure stable and reliable liquid supply.
The upper computer collects historical consumption data, gives reliable liquid filling, and prompts to change the barrel.
High-precision chemical blending + supply system
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25% TMAH (stock solution)
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2.38% TMAH (± 0.01% accuracy)
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0.4% TMAH (± 0.05% accuracy)
25% TMAH is stored in the original liquid tank.
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It is made into high-precision 2.38% concentration and stored in daily use tanks through the distribution cabinet.
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High-precision on-line concentration meter detection ensures accuracy.
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High-precision temperature detection to compensate for the effect of temperature on concentration.
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Independent deployment system, independent supply system, independent filtration and concentration monitoring system.
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The high-cleanliness sampling system without dead angles ensures the reliability of offline testing.
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Remote monitoring system to monitor concentration curve in real time.
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Optional: dual online concentration monitoring.
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Optional: Online monitoring of the quality of the stock solution.
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Optional: High-precision flow monitoring.
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Optional: terminal temperature and concentration compensation.
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